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Volumn , Issue , 2009, Pages 2763-2769

Stress-driven MEMS assembly + electrostatic forces = 1mm diameter robot

Author keywords

[No Author keywords available]

Indexed keywords

MANUFACTURING METHODS; MEMS ASSEMBLY; MODULAR ROBOTICS;

EID: 76249127477     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IROS.2009.5354049     Document Type: Conference Paper
Times cited : (43)

References (15)
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    • www.xfab.com/.
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    • 84970931881 scopus 로고    scopus 로고
    • Apiezon. Apiezon wax w, www.apiezon.com/pdfs/apwaxw.pdf.
    • Apiezon wax w
  • 3
    • 84868163824 scopus 로고    scopus 로고
    • at Carnegie Mellon University
    • Claytronics at Carnegie Mellon University. www.cs.cmu.edu/~claytronics/ movies/1xtube back-and-forth.mp4.
    • Claytronics
  • 5
    • 32244432061 scopus 로고    scopus 로고
    • B. Donald, C. Levey, et al. An untethered, electrostatic, globally controllable mems micro-robot. Microelectromechanical Systems, Journal of, 15(1):1-15, Feb. 2006.
    • B. Donald, C. Levey, et al. An untethered, electrostatic, globally controllable mems micro-robot. Microelectromechanical Systems, Journal of, 15(1):1-15, Feb. 2006.
  • 8
    • 0024029417 scopus 로고
    • The fabrication of an electrostatic linear actuator by silicon micromachining
    • Jun
    • H. Fujita and A. Omodaka. The fabrication of an electrostatic linear actuator by silicon micromachining. Electron Devices, IEEE Transactions on, 35(6):731-734, Jun 1988.
    • (1988) Electron Devices, IEEE Transactions on , vol.35 , Issue.6 , pp. 731-734
    • Fujita, H.1    Omodaka, A.2
  • 9
    • 58049084334 scopus 로고    scopus 로고
    • Claytronics: A scalable basis for future robots
    • November
    • S. C. Goldstein and T. C. Mowry. Claytronics: A scalable basis for future robots. In RoboSphere 2004, November 2004.
    • (2004) RoboSphere 2004
    • Goldstein, S.C.1    Mowry, T.C.2
  • 13
    • 1842514760 scopus 로고    scopus 로고
    • MicroChem. Microchem, www.microchem.com/products/pdf/su-8-table-of- properties.pdf.
    • Microchem
  • 14
    • 52649156981 scopus 로고    scopus 로고
    • 3 autonomous systems
    • 3 autonomous systems. In Nanotech 2008, volume 3, 2008.
    • (2008) Nanotech , vol.3 , pp. 2008
    • Reid, J.1    Vasilyev, V.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.