A three-dimensional micro-electro-mechanical system (MEMS) optical switch module using low-cost highly accurate polymer components

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 8 B, 2004, Pages 5824-5827

  Yamamoto, Tsuyoshi ^a   Yamaguchi, Johji ^a   Takeuchi, Nobuyuki ^a   Shimizu, Akira ^a   Sawada, Renshi ^a   Higurashi, Eiji ^a   Uenishi, Yuji ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Free space optics; MEMS; Micromachine; Optical crossconnects; Optical switch; OXC

Indexed keywords

DENSITY (OPTICAL); MIRRORS; OPTICAL FIBERS; OPTICAL SWITCHES; SIGNAL PROCESSING; SIGNAL TO NOISE RATIO; SINGLE CRYSTALS;

ELECTRICAL-OPTICAL CONVERSIONS; FREE-SPACE OPTICS; MICROMACHINES; OPTICAL CROSSCONNECTS (OXC);

MICROELECTROMECHANICAL DEVICES;

EID: 7544233536     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.5824     Document Type: Conference Paper

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