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Volumn 27, Issue 11, 2004, Pages 46-52

Metrology develops to measure thinner films better

(1)  Braun, Alexander E a  

a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ELLIPSOMETRY; FLUORESCENCE; NANOTECHNOLOGY; PHOTOACOUSTIC EFFECT; POLARIZATION; SILICON COMPOUNDS; SPECTROMETRY; STATISTICAL PROCESS CONTROL; THICKNESS MEASUREMENT; ULTRAVIOLET RADIATION; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 7544231744     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review
Times cited : (3)

References (0)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.