Parallel unstructured dynamic grid direct Monte Carlo simulation of molecular gas dynamics and its applications

Journal of Scientific Computing

Volumn 16, Issue 4, 2001, Pages 553-568

  Singh, Abhinav ^a   Zhao, Yong ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

DSMC; Dynamic unstructured grid; Parallel computing; Thin film deposition

Indexed keywords

DSMC; DYNAMIC UNSTRUCTURED GRID; MOLECULAR GAS DYNAMICS; THIN FILM DEPOSITION;

DEFORMATION; DEPOSITION; MICROSTRUCTURE; MOLECULAR DYNAMICS; MONTE CARLO METHODS; PARALLEL PROCESSING SYSTEMS; SURFACE PHENOMENA; THIN FILMS;

GAS DYNAMICS;

EID: 7544225444     PISSN: 08857474     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1013202608140     Document Type: Article

References (11)

1. Bird, G. A. (1994). Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Caledron Press, Oxford.
2. Garcia, A. L. (1997). Direct Simulation Monte Carlo: Novel Applications and Extensions, Proceedings of the 3rd Workshop on the Modeling of Chemical Reaction Systems, Heidelberg (Germany).
3. Ikegawa, M., and Kobayashi, J. (1989). Deposition profile simulation using the direct simulation Monte Carlo method. J. Electrochem. Soc. 136(10), 2982-2986.
4. Cooke, M. J., and Harris, G. (1989). monte carlo simulation of thin-film deposition in a rectangular groove. J. Vac. Technol. A 7(6), 3217-3221.
5. Gimelshein, S., Markelov, G., and Rieffel, M. (1996). Collision Models in the Hawk DSMC Implementation, Caltech Technical Report CIT-TR-96-16.
6. Cercignani, C., and Lampis, M. (1974). In Karamcheti, K. (ed.), Rarefied Gas Dynamics, Academic Press, New York.
7. Lord, R. G. (1991). In Beylich, A. E. (ed.), Rarefied Gas Dynamics, Weinheim, Germany.
8. Lord, R. G. (1991). Some extensions to the Cercignani-Lampis gas scattering kernel. Phys. Fluids A 3, 706-710.
9. Goodman, F., and Wachman, H. (1976). Dynamics of Gas-Surface Scattering, Academic Press, New York.
10. Zienkiewicz, O. C., and Morgan, K. (1983). Finite Elements and Approximation, Wiley.
11. Singh, A. (2000). Parallel Unstructured Grid DSMC for the Study of Molecular Gas Danymics in Semi-conductor Manufacturing, MEng thesis, School of MPE, NTU.