Generation of atomic hydrogen during radio-frequency nitrogen plasma-assisted gas-source molecular-beam epitaxy of III-V dilute nitrides

Applied Physics Letters

Volumn 85, Issue 13, 2004, Pages 2478-2480

  Fotkatzikis, A ^a   Pinault, M A ^a   Freundlich, A ^a  

^a UNIVERSITY OF HOUSTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC HYDROGEN; DILUTE NITRIDES; GAS-SOURCE MOLECULAR BEAM EPITAXY (GSMBE); PLASMA SPECTRUM;

DATA ACQUISITION; DECOMPOSITION; DIFFUSION; EMISSION SPECTROSCOPY; HYDROGEN; MASS SPECTROMETERS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR BEAM EPITAXY; OPTICAL FIBERS; PLASMA APPLICATIONS; PRESSURE EFFECTS; PRESSURE GAGES;

SEMICONDUCTOR MATERIALS;

EID: 7544222857     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1796537     Document Type: Article

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