Quantitative measurement of boron and phosphorus in solar grade silicon feedstocks by high resolution fast-flow glow-discharge mass spectrometry

Materials Research Society Symposium Proceedings

Volumn 1123, Issue , 2009, Pages 131-136

  Putyera, Karol ^a   Su, Kenghsien ^a   Liu, Changhsiu ^a   Hockett, R S ^b   Wang, Larry ^b  

^a Evans Analytical Group   (United States)

^b CHARLES EVANS AND ASSOCIATES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTES; ANALYTICAL PROCEDURE; CALIBRATION FACTORS; CHARACTERIZATION TECHNIQUES; CONFIDENCE INTERVAL; GLOW DISCHARGE MASS SPECTROMETRY; HIGH RESOLUTION; METAL SAMPLES; P-VALUES; PHOSPHORUS CONTENTS; PHOTOVOLTAIC APPLICATIONS; QUANTITATIVE MEASUREMENT; REFERENCE MATERIAL; RELATIVE ERRORS; SAMPLE FORM; SINGLE-CRYSTALLINE; SOLAR GRADE SILICONS; TRACEABLE TO NIST;

BORON; BORON COMPOUNDS; CALIBRATION; INDUSTRIAL RESEARCH; MASS SPECTROMETERS; MASS SPECTROMETRY; METAL REFINING; PHOSPHORUS; RELUCTANCE MOTORS; SILICON; SILICON WAFERS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 74549164866     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. th Workshop on Crystalline Silicon Solar Cells & Modules: Materials and Processes, edited by B. L. Sopori, published by NREL 2008, pp. 48-59.
2. rd European Photovoltaic Solar Energy Conference 2008, pp. 1209-1212
3. rd European Photovoltaic Solar Energy Conference 2008, pp. 2328-2331.
4. th European Photovoltaic Solar Energy Conference 1992, pp. 484-486.
5. SEMI PV1-0309 - Test Method For Measuring Trace Elements in Photovoltaic-Grade Silicon by High-Mass Resolution Glow Discharge Mass Spectrometry
6. J. Hinrichs, M. Hamester and L. Rottman, Thermo Fisher Scientific, www.thermo.com, Application Note: 30164.
7. nd European Photovoltaic Solar Energy Conference 2007, pp 271-276.