Highly stable and sensitive humidity sensors based on quartz crystal microbalance coated with hexagonal lamelliform monodisperse mesoporous silica SBA-15 thin film

Sensors and Actuators, B: Chemical

Volumn 144, Issue 1, 2010, Pages 164-169

  Zhu, Yongheng ^a   Yuan, Hao ^b   Xu, Jiaqiang ^a,c   Xu, Pengcheng ^c   Pan, Qingyi ^a  

^a SHANGHAI UNIVERSITY   (China)

^b SHANGHAI SECOND POLYTECHNIC UNIVERSITY   (China)

^c SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Humidity sensor; Mesoporous silica; Quartz crystal microbalance; SBA 15 thin film

Indexed keywords

ADDITIONAL MASS; ADSORPTION OF WATER; ADSORPTION/DESORPTION; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; GOOD STABILITY; HIGH SENSITIVITY; HUMIDITY SENSING; MESOPOROUS SILICA; MONODISPERSE; NEW APPLICATIONS; REPRODUCIBILITIES; RESONANT FREQUENCY SHIFT; RESPONSE/RECOVERY TIME; SENSING MATERIAL;

ADSORPTION; FIELD EMISSION; FIELD EMISSION MICROSCOPES; HUMIDITY SENSORS; MOISTURE; NATURAL FREQUENCIES; OXIDE MINERALS; PIEZOELECTRIC DEVICES; POLYETHYLENES; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; SCANNING ELECTRON MICROSCOPY; SILICA; THIN FILM DEVICES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

MESOPOROUS MATERIALS;

EID: 74149092707     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.10.053     Document Type: Article

References (36)

1. Yamazoe N., and Shimizu Y. Humidity sensors: principles and applications. Sens. Actuators 10 (1986) 379-398
2. 3 ceramic humidity sensor. J. Mater. Sci. 24 (1989) 2739-2745
3. 2 electrospun nanofibers. J. Am. Chem. Soc. 130 (2008) 5036-5037
4. Li Y., and Yang M.J. A novel highly reversible humidity sensor based on poly (2-propyn-2-furoate). Sens. Actuators B 86 (2002) 155-159
5. Yang M.J., Li Y., Camaioni N., Miceli G.G., Martelli A., and Ridolfi G. Polymer electrolytes as humidity sensors: progress in improving an impedance device. Sens. Actuators B 86 (2002) 229-234
6. Corres J.M., Arregui F.J., and Matías I.R. Sensitivity optimization of tapered optical fiber humidity sensors by means of tuning the thickness of nanostructure sensitive coatings. Sens. Actuators B 122 (2007) 442-449
7. 2+-doped ZnO nano-tetrapods. Sens. Actuators B 253 (2007) 3168-3173
8. Kim D.U., and Gong M.S. Thick films of copper-titanate resistive humidity sensor. Sens. Actuators B 110 (2005) 321-326
9. Fürjes P., Kovács A., Dücso{combining double acute accent} Cs., Ádám M., Müller B., and Mescheder U. Porous silicon-based humidity sensor with interdigital electrodes and internal heaters. Sens. Actuators B 95 (2003) 140-144
10. Wang X.H., Ding Y.F., Zhang J., Zhu Z.Q., You S.Z., Chen S.Q., and Zhu J. Humidity sensitive properties of ZnO nanotetrapods investigated by a quartz crystal microbalance. Sens. Actuators B 115 (2006) 421-427
11. Caliendo C., Verona E., and Anisimkin V.I. Surface acoustic wave humidity sensors: a comparison between different types of sensitive membrane. Smart Mater. Struct. 6 (1997) 707-715
12. Penza M., and Anisimkin V.I. Surface acoustic wave humidity sensor using polyvinyl-alcohol film. Sens. Actuators B 76 (1999) 162-166
13. Korsar K., Ma C.L., and Dress B. Harmonic frequency analysis of SAW resonator chemical sensors: application to the detection of carbon dioxide and humidity. Sens. Actuators B 50 (1998) 110-116
14. Cunningham A.J. Introduction to Bioanalytical Sensors (1998), Wiley, New York p. 307
15. Sauerbrey G. The use of quartz oscillators for weighing thin layers and for microweighing. Z. Phys. 155 (1959) 206-222
16. King W.H. Anal. Chem. 36 (1964) 1735-1739
17. Neshkova M., Petrova R., and Petrov V. Piezoelectric quartz crystal humidity sensor using chemically modified nitrated polystyrene as water sorbing coating. Anal. Chim. Acta 332 (1996) 93-103
18. Sun L.X., and Okada T. Simultaneous determination of the concentration of methanol and relative humidity based on a single Nafion(Ag)-coated quartz crystal microbalance. Anal. Chim. Acta 421 (2000) 83-92
19. Syritski V., Reut J., Öpik A., and Idla K. Environmental QCM sensors coated with polypyrrole. Synth. Met. 102 (1999) 1326-1327
20. Mintova S., and Bein T. Nanosized zeolite films for vapor-sensing applications. Micropor. Mesopor. Mater. 50 (2001) 159-166
21. Zhang Y., Yu K., Ouyang S., Luo L., Hu H., Zhang Q., and Zhu Z. Detection of humidity based on quartz crystal microbalance coated with ZnO nanostructure films. Physica B 368 (2005) 94-99
22. Chen H.W., Wu R.J., Chan K.H., Sun Y.L., and Su P.G. The application of CNT/Nafion composite material to low-humidity sensing measurement. Sens. Actuators B 104 (2005) 80-84
23. Su P.G., Sun Y.L., and Lin C.C. A low-humidity sensor made of quartz microbalance coated with multi-walled carbon nanotubes/nafion composite material films. Sens. Actuators B 115 (2006) 338-343
24. 2 nanoparticles composite thin films. Sens. Actuators B 129 (2008) 915-920
25. Kresge C.T., Leonwicz M.E., Roth W.J., Vartuli J.C., and Beck J.S. Ordered mesoporous molecular sieves synthesized by a liquid-crystal template mechanism. Nature 359 (1992) 710-712
26. Kisler J.M., Dahler A., Stevens G.W., and Connor J.O. Separation of biological molecules using mesoporous molecular sieves. Micropor. Mesopor. Mater. 44 (2001) 769-774
27. He X., and Antoneili D. Recent advances in synthesis and applications of transition metal containing mesoporous molecular sieves. Angew. Chem. Int. Ed. 41 (2002) 214-229
28. Chae W.S., and Kim Y.R. Structural confinement effects of ternary chalcogenide in mesoporous Al-MCM-41 of different pore diameter. J. Phys. Chem. B 107 (2003) 1585-1591
29. Parala H., Winkler H., Kolbe M., Wohlfart A., Fischer R.A., and Schmechel R. Confinement of CdSe nanoparticles inside MCM-41. Adv. Mater. 12 (2000) 1050-1055
30. Wager T., Waitz T., Roggenbuck J., Froba M., Kohl C.D., and Tiemann M. Ordered mesoporous ZnO for gas sensing. Thin Solid Films 515 (2007) 8360-8363
31. 2 powder for gas sensor application. Sens. Actuator B 108 (2005) 56-61
32. Zhao D.Y., Feng J.L., Huo Q.S., Melosh N., Fredrickson G.H., Chemelka B.F., and Stucky G.D. Triblock copolymer syntheses of mesoporous silica with periodic 50 to 300 angstrom pores. Science 279 (1998) 548-552
33. Zhao D.Y., Huo Q.S., Feng J.L., Chmelka B.F., and Stucky G.D. Nonionic triblock and star diblock copolymer and oligomeric surfactant syntheses of highly ordered, hydrothermally stable, mesoporous silica structures. J. Am. Chem. Soc. 120 (1998) 6024-6036
34. Miyazawa K., and Inagaki S. Control of the microporosity within the pore walls of ordered mesoporous silica SBA-15. Chem. Commun. (2000) 2121-2122
35. 3 and polymer RMX. Sens. Actuator B 81 (2002) 248-253
36. 3/polystyrene sulfonic sodium. Mater. Chem. Phys. 78 (2003) 746-750