Measurement of steep surfaces using white light interferometry

Strain

Volumn 46, Issue 1, 2010, Pages 69-78

  Coupland, J M ^a   Lobera, J ^b  

^a LOUGHBOROUGH UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF ZARAGOZA   (Spain)

Author keywords

Multiple scattering; Nonlinear optimisation methods; Optical tomography; Profilometry; Scanning white light interferometry

Indexed keywords

FEM MODELS; HIGH ASPECT RATIO; INTERFEROGRAMS; NONLINEAR OPTIMISATION; NONLINEAR OPTIMISATION METHODS; NUMERICAL APERTURE; OBJECTIVE LENS; SCANNING WHITE LIGHT INTERFEROMETRY; SPATIAL FREQUENCY; STEEP GRADIENTS; STEP CHANGES; SURFACE GRADIENTS; SURFACE PROFILES; V GROOVES; WHITE-LIGHT INTERFEROMETRY;

ASPECT RATIO; FINITE ELEMENT METHOD; INSTRUMENTS; INTERFEROMETERS; INTERFEROMETRY; MULTIPLE SCATTERING; OPTICAL TOMOGRAPHY; PROFILOMETRY; SCANNING; THREE DIMENSIONAL;

TWO DIMENSIONAL;

EID: 74049133590     PISSN: 00392103     EISSN: 14751305     Source Type: Journal    
DOI: 10.1111/j.1475-1305.2008.00595.x     Document Type: Article

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