Photonic integration in a commercial scaled bulk-CMOS process

2009 International Conference on Photonics in Switching, PS '09

Volumn , Issue , 2009, Pages

  Orcutt, J S ^a   Khilo, A ^a   Popovic M A ^a   Holzwarth, C W ^a   Li, H ^a   Sun, J ^a   Moss, B ^a   Dahlem, M S ^a   Ippen, E P ^a   Hoyt, J L ^a   Stojanovic V ^a   Kartner F X ^a   Smith, H I ^a   Ram, R J ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Add drop filter; CMOS; Microring resonator; Photonic integrated circuits; Silicon photonics

Indexed keywords

65-NM-NODE; ADD/DROP FILTERS; BULK CMOS; CMOS PROCESSS; HIGH-PERFORMANCE MICROPROCESSORS; MICRORING RESONATOR; PHOTONIC CHIPS; PHOTONIC INTEGRATED CIRCUITS; PHOTONIC INTEGRATIONS; POST PROCESSING; SILICON PHOTONICS;

INTEGRATED CIRCUITS; OPTICAL RESONATORS; PHOTONIC DEVICES; PHOTONICS;

CMOS INTEGRATED CIRCUITS;

EID: 73649097962     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PS.2009.5307769     Document Type: Conference Paper

References (5)

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3. C. Gunn: "CMOS photonics for high-speed interconnects," IEEE Micro, vol.26, no.2, IEEE 2006.
4. C. Holzwarth et al.: "Localized substrate removal technique enabling strong-confinement microphotonics in bulk Si CMOS processes," Conf. on Lasers and Electro-Optics, (San Jose, USA) 2008.
5. M. A. Popović, et al., "Low-loss Bloch waves in open structures and highly compact, efficient Si waveguide-crossing arrays," An. Meet. IEEE Lasers and Electro-Optics Soc., (Lake Buena Vista, USA) 2007.