Piezoeletric micropump for drug delivery system fabricated using two optical masks

Advanced Materials Research

Volumn 74, Issue , 2009, Pages 279-282

  Johari, Juliana ^a   Yunas, Jumril ^a   Majlis, Burhanuddin Yeop ^a  

^a INSTITUTE OF MICROENGINEERING AND NANOELECTRONICS IMEN   (Malaysia)

Author keywords

Drug delivery; FSI; MEMS; Piezoelectric micropump

Indexed keywords

COVENTORWARE; DRUG DELIVERY SYSTEM; ELECTRICAL FIELD; LEAD TITANATES; MEMS FABRICATION; MICRO PUMP; MICROMACHINING PROCESS; OPTICAL MASK; PIEZOELECTRIC MICROPUMPS; PRELIMINARY ANALYSIS; PUMP SYSTEM; PUMPING EFFECT; PZT; SILICON MEMBRANES; VALVELESS MICROPUMPS; WORKING BEHAVIOUR; ZIRCONATES;

FABRICATION; FLUID STRUCTURE INTERACTION; LEAD; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PIEZOELECTRICITY; PUMPS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

DRUG DELIVERY;

EID: 73549091972     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMR.74.279     Document Type: Conference Paper

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