Elaboration of one-dimensional photonic structure on silicon by electrochemical etching

Physics Procedia

Volumn 2, Issue 3, 2009, Pages 759-764

  Fellahi, O ^a   Hadjersi, T ^a   Ouadah, Y ^a  

^a L'Unite de Developpement de la Technologie du Silicium   (Algeria)

Author keywords

Electrochemical etching; Optical microcavity; Photonic crystal

Indexed keywords

DBR; ETCHING TIME; EXPERIMENTAL PARAMETERS; MODULATED CURRENT; MORPHOLOGICAL ANALYSIS; MULTILAYER STRUCTURES; OPTICAL MICROCAVITIES; OPTICAL MICROCAVITY; PERIODIC LAYERS; PHOTONIC BAND-GAP STRUCTURES; PHOTONIC STRUCTURE; POROUS LAYERS; POROUS SILICON SURFACES; REFLECTION SPECTRA; SCANNING ELECTRON MICROSCOPE; SI(1 0 0);

MICROCAVITIES; MULTILAYERS; OPTICAL MULTILAYERS; PERIODIC STRUCTURES; PHOTONIC BAND GAP; PHOTONIC CRYSTALS; POROUS SILICON; REFLECTION; SCANNING ELECTRON MICROSCOPY;

ELECTROCHEMICAL ETCHING;

EID: 73449121953     PISSN: 18753884     EISSN: 18753892     Source Type: Conference Proceeding    
DOI: 10.1016/j.phpro.2009.11.022     Document Type: Article

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