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Volumn 23, Issue 2-4, 2009, Pages 326-330
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Deposition of Europium Oxide on Si and its optical properties depending on thermal annealing conditions
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Author keywords
Europium silicate; Photoluminescence; Rapid thermal annealing; RF sputtering
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Indexed keywords
AMBIENT GAS;
EUROPIUM OXIDE;
EUROPIUM SILICATE;
PHOTOLUMINESCENCE PROPERTIES;
PL SPECTRA;
RADIO-FREQUENCY-MAGNETRON SPUTTERING;
RF-SPUTTERING;
SI SUBSTRATES;
THERMAL-ANNEALING;
EUROPIUM;
LIGHT;
OPTICAL PROPERTIES;
PHOTOLUMINESCENCE;
RAPID THERMAL ANNEALING;
RAPID THERMAL PROCESSING;
SEMICONDUCTING SILICON COMPOUNDS;
SILICATES;
THIN FILMS;
EUROPIUM COMPOUNDS;
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EID: 73449096809
PISSN: 13853449
EISSN: 15738663
Source Type: Journal
DOI: 10.1007/s10832-008-9449-7 Document Type: Article |
Times cited : (7)
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References (12)
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