Applicable research of thermal conductivity sensor for gases based on MEMS

Chinese Journal of Sensors and Actuators

Volumn 22, Issue 7, 2009, Pages 1050-1054

  Wang, Haoyu ^a   Cao, Jian ^a   An, Chenguang ^b  

^a CENTRAL SOUTH UNIVERSITY   (China)

^b Beijing Huadian Yuntong Power Technical Co Ltd   (China)

Author keywords

Filter; MEMS; Noise; TCD; TCS208F

Indexed keywords

EID: 73349120225     PISSN: 10041699     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

1. Gardner J W, Varadan V, Awadelkarim O O. Microsensor, MEMS and Smart Devices[M]. New York: Joho Wiley & Sons, 2001
2. Huang J B. Ho C M. Micro Thermal Shear Stress Sensor with and Without Cavity Underneath [C]// IEEE Proc Instruments Measurement Technology Conf 1995:171-174