A compact soft X-ray microscope using an electrode-less Z-pinch source

Journal of Physics: Conference Series

Volumn 186, Issue , 2009, Pages

  Horne, S F ^a   Silterra, J ^a   Holber, W ^a  

^a ENERGETIQ TECHNOLOGY INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 73349119989     PISSN: 17426588     EISSN: 17426596     Source Type: Journal    
DOI: 10.1088/1742-6596/186/1/012028     Document Type: Conference Paper

References (4)

1. Sayre D, Kirz J, Feder R, Kim DM and Spiller E 1977 Science 196 1339
2. Blackborow P, Gustafson D, Smith D K, Besen, M, Horne S, D'Agostino R, Minami Y, Denbeaux, G 2007 Application of the Energetiq EQ-10 electrodeless Z-Pinch EUV light source in outgassing and exposure of EUV photoresist Emerging Lithographic Technologies XI.: Proc SPIE, (San Jose USA Feb 25-Mar 2 vol 6517 ed M J Lercel p 65171
3. Attwood D 2000 Soft X-rays and Extreme Ultraviolet Radiation:Principles and Applications (Cambridge University Press)
4. Kim, K W et al 2006 Phys. Med. Biol. 51 N99