Mechanical design of ultraprecision weak-link stages for nanometer-scale X-ray imaging

Journal of Physics: Conference Series

Volumn 186, Issue , 2009, Pages

  Shu, D ^a   Maser, J ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 73349117197     PISSN: 17426588     EISSN: 17426596     Source Type: Journal    
DOI: 10.1088/1742-6596/186/1/012017     Document Type: Conference Paper

References (12)

1. Maser J et al 2006 Proc. 8th Int. Conf. X-ray Microscopy, IPAP Conf. Series 7 p 26-29
2. Shu D et al 2006 Proc. 8th Int. Conf. X-ray Microscopy, IPAP Conf. Series 7 p 56-58
3. Shu D, J Maser, B Lai, F S Vogt, M V Holt, C A Preissner, R Winarski and G B Stephenson 2008 U.S. Patent granted No. 7,331,714
4. Shu D, T S Toellner and E E Alp 2003 U.S. Patent granted No. 6,607,840
5. Shu D, T S Toellner and E E Alp 2006 U.S. Patent granted No. 6,984,335
6. Shu D, T S Toellner and E E 2001 Alp, Nucl. Instrum. Methods A 467-468 771-774
7. Xradia is a trademark of the Xradia Inc. California, USA
8. Physik Instrumente (PI) is a trademark of the Physik Instrumente GmbH & Co. Germany
9. Shu D and J Barraza 1996 U.S. Patent granted No. 5,526,903
10. Shu D, Y Han, T S Toellner and E E 2002 Alp, Proc. SPIE 4771 78-90
11. Shu D and J Maser U.S. Patent application in progress for ANL-IN-08-013
12. Maser J et al 2004 Proc. SPIE-Int. Soc. Opt. Eng. 5539 185