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Volumn , Issue , 2005, Pages 1009-1014
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A picometer positioning system using active aerostatic guideway
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Author keywords
Active control; Aerostatic guideway; Machine tool; Nanotechnology; Picometer; Positioning
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Indexed keywords
ACTIVE CONTROL;
FRICTION DRIVE;
NANOMETER POSITIONING;
PICOMETER;
POSITIONING;
POSITIONING SYSTEM;
SUB NANOMETERS;
ULTRA-PRECISION POSITIONING;
AERODYNAMICS;
MACHINE TOOLS;
MANUFACTURE;
NANOTECHNOLOGY;
GUIDEWAYS;
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EID: 73149104777
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (3)
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References (7)
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