Development of oxide semiconductor thick film gas sensor for the detection of total volatile organic compounds

IEEJ Transactions on Sensors and Micromachines

Volumn 128, Issue 4, 2008, Pages 125-130

  Kadosaki, Masahiro ^a   Sakai, Yuichi ^a   Tamura, Ikuo ^a   Matsubara, Ichiro ^b   Itoh, Toshio ^b  

^a TOYAMA INDUSTRIAL TECHNOLOGY CENTER   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Gas sensor; Oxide semiconductor; Thick film; Volatile organic compound

Indexed keywords

ALIPHATIC HYDROCARBONS; BUILDING CODES; CHEMICAL SENSORS; GAS CHROMATOGRAPHY; GAS DETECTORS; GASES; HALOGENATION; INDOOR AIR POLLUTION; NATURAL GASOLINE; PLATINUM COMPOUNDS; THICK FILMS; TUNGSTEN COMPOUNDS; VOLATILE ORGANIC COMPOUNDS;

BUILDING STANDARDS; GROSS WEIGHT; HALOGENATED HYDROCARBONS; HIGH SENSITIVITY; INDOOR AIR POLLUTANTS; METAL OXIDES; SENSING PROPERTY; TOTAL VOLATILE ORGANIC COMPOUNDS;

OXIDE SEMICONDUCTORS;

EID: 73049099546     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.128.125     Document Type: Article

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