ZnCoO films by atomic layer deposition - Influence of a growth temperature on uniformity of cobalt distribution

Acta Physica Polonica A

Volumn 116, Issue 5, 2009, Pages 921-923

  Lukasiewicz M I ^a   Witkowski, B ^b   Godlewski, M ^a,b   Guziewicz, E ^a   Sawicki, M ^a   Paszkowicz, W ^a   Lusakowska E ^a   JakieLa R ^a   Krajewski, T ^a   Kowalik, I A ^a   Kowalski, B J ^a  

^a INSTITUTE OF PHYSICS   (Poland)

^b CARDINAL STEFAN WYSZY SKI UNIVERSITY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC LAYER DEPOSITION; COBALT; ENERGY DISPERSIVE SPECTROSCOPY; GROWTH TEMPERATURE; MAGNETIC PROPERTIES; MASS SPECTROMETRY; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; THIN FILMS; X RAY DIFFRACTION; ZINC;

COBALT PRECURSORS; DIETHYLZINC; DIMETHYLZINC; ELECTRICAL AND MAGNETIC PROPERTY; ORGANIC PRECURSOR; SECONDARY ION MASS SPECTROSCOPY; UNIFORM FILMS; ZINC PRECURSOR;

DEPOSITION;

EID: 72949097645     PISSN: 05874246     EISSN: 1898794X     Source Type: Journal    
DOI: 10.12693/APhysPolA.116.921     Document Type: Conference Paper

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