Diameter-dependent guided resonance of dielectric hole-array membrane

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 3183-3186

  Ou, Neil ^a   Shyu, J H ^a   Lee, H M ^a   Wu, J C ^a  

^a NATIONAL CHANGHUA UNIVERSITY OF EDUCATION   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FANO RESONANCES; FINITE SIZE; HOLE DIAMETER; MODE SPLITTING; OPTICAL TRANSMISSION MEASUREMENTS; PHOTONIC CRYSTAL SLAB; PLANE WAVE EXPANSION METHOD; SILICON NITRIDE MEMBRANE; SILICON SUBSTRATES; SUBMICRON; TRANSMISSION SPECTRUMS;

ABSORPTION; DRY ETCHING; ELECTRON BEAMS; LATTICE CONSTANTS; LIGHT TRANSMISSION; PHOTONIC CRYSTALS; PLASMA ETCHING; RESONANCE; SILICON NITRIDE; WET ETCHING;

REACTIVE ION ETCHING;

EID: 72849150309     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3259957     Document Type: Conference Paper

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