Fabrication of high density, high-aspect-ratio polyimide nanofilters

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2585-2587

  Makarova, Olga V ^a   Tang, Cha Mei ^a   Amstutz, Platte ^a   Divan, Ralu ^b   Imre, Alexandra ^b   Mancini, Derrick C ^b   Hoffbauer, Mark ^c   Williamson, Todd ^c  

^a CREATV MICROTECH INC   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGETIC NEUTRAL ATOMS; FABRICATION PROCESS; HIGH ASPECT RATIO; HIGH DENSITY; HIGH POROSITY; HIGH-PRECISION; NANOFILTERS; STRAIGHT PORES;

CRYSTAL GROWTH; ELECTRON BEAMS; NANOFILTRATION; POLYIMIDES;

ASPECT RATIO;

EID: 72849107108     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3242696     Document Type: Conference Paper

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