Novel architecture for inertial grade SOI MEMS inertial sensors

Proceedings - IEEE International SOI Conference

Volumn , Issue , 2009, Pages

  Aziz, Ahmed Abdel ^a   Sharaf, Abdel Hameed ^a,b   Serry, Mohamed ^c   Sedky, Sherif ^a,d  

^a AMERICAN UNIVERSITY IN CAIRO   (Egypt)

^b NATIONAL CENTER FOR RADIATION RESEARCH AND TECHNOLOGY   (Egypt)

^c KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Saudi Arabia)

^d The American University in Cairo   (Egypt)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 72449144684     PISSN: 1078621X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SOI.2009.5318765     Document Type: Conference Paper

References (2)

1. R. Abdolvand, B.V. Amini, and F. Ayazi, "Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass," IEEE Journal of Micro-electro-mechanical Systems, Vol. 16, 2007, pp. 1036-1043
2. A. Sharma, F. Zaman, B. Amini, F. Ayazi, "A High-Q In-Plane SOI Tuning Fork Gyroscope", IEEE, 2004, pp. 467-470