Theoretical research on piezoresistive coefficients of polysilicon films

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 25, Issue 3, 2004, Pages 292-296

  Liu, Xiaowei ^a   Huo, Mingxue ^a   Chen, Weiping ^a   Wang, Donghong ^a   Zhang, Ying ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Piezoresistive coefficient; Polysilicon; Stress decouple model

Indexed keywords

ELECTRIC RESISTANCE; GRAIN BOUNDARIES; PIEZOELECTRICITY; POLYSILICON; STRESSES;

PIEZORESISTIVE COEFFICIENT; STRESS DECOUPLE MODEL;

SEMICONDUCTING FILMS;

EID: 7244259007     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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