A novel mems respiratory flow sensor

IEEE Sensors Journal

Volumn 10, Issue 1, 2010, Pages 16-18

  Wei, C L ^a   Lin, C F ^b   Tseng, I T ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL APPLIED RESEARCH LABORATORIES   (Taiwan)

Author keywords

CMOS MEMS; Flow sensor; Respiratory monitoring

Indexed keywords

FLOW-SENSORS; MEMS SENSORS; MIXED SIGNAL; POLYCIDE; RESPIRATORY FLOW; RESPIRATORY MONITORING; SENSING CIRCUITS; SINGLE CHIPS;

COST REDUCTION; RESPIRATORS;

SENSORS;

EID: 72349087377     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2035192     Document Type: Article

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