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Volumn 131, Issue 47, 2009, Pages 17034-17035

Electrical double layer catalyzed wet-etching of silicon dioxide

Author keywords

[No Author keywords available]

Indexed keywords

ALKALINE SOLUTIONS; BULK VALUE; CATALYTIC EFFECTS; CONCENTRATION OF; ELECTRICAL DOUBLE LAYERS; LATERAL RESOLUTION; NANOSCALE FEATURES; SILICON DIOXIDE; SPONTANEOUS ADSORPTION;

EID: 72249099870     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja903333s     Document Type: Article
Times cited : (17)

References (14)
  • 1
    • 72249089329 scopus 로고    scopus 로고
    • ed. accessed May 2009
    • International Technology Roadmap for Semiconductors, 2007 ed. http:// www.itrs.net/Links/2007ITRS/Home2007.htm (accessed May 2009).
    • (2007)
  • 4
    • 72249091670 scopus 로고    scopus 로고
    • Bhushan, B., Ed.; Springer: Berlin
    • Springer Handbook of Nanotechnology; Bhushan, B., Ed.; Springer: Berlin, 2004; p 871.
    • (2004) Springer Handbook of Nanotechnology , pp. 871
  • 6
    • 33750494925 scopus 로고    scopus 로고
    • (b) Beattie, J. K. Lab Chip 2006, 6, 1409-1411.
    • (2006) Lab Chip , vol.6 , pp. 1409-1411
    • Beattie, J.K.1
  • 11
    • 72249095830 scopus 로고    scopus 로고
    • Because of the finite radius of the AFM tip, these measurements underestimate the true geometry of the trench
    • Because of the finite radius of the AFM tip, these measurements underestimate the true geometry of the trench.
  • 13
    • 72249117558 scopus 로고    scopus 로고
    • It is also possible that the electrical double layer model, which was developed for the bulk surfaces, may not describe the nanoscale interface well
    • It is also possible that the electrical double layer model, which was developed for the bulk surfaces, may not describe the nanoscale interface well.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.