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Volumn 131, Issue 47, 2009, Pages 17034-17035
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Electrical double layer catalyzed wet-etching of silicon dioxide
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Author keywords
[No Author keywords available]
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Indexed keywords
ALKALINE SOLUTIONS;
BULK VALUE;
CATALYTIC EFFECTS;
CONCENTRATION OF;
ELECTRICAL DOUBLE LAYERS;
LATERAL RESOLUTION;
NANOSCALE FEATURES;
SILICON DIOXIDE;
SPONTANEOUS ADSORPTION;
ADSORPTION;
CARBON NANOTUBES;
ELECTRIC PROPERTIES;
ETCHING;
SILICA;
SILICON OXIDES;
CARBON NANOTUBE;
HYDROXIDE;
SILICON DIOXIDE;
ADSORPTION;
ARTICLE;
CATALYSIS;
CHEMICAL REACTION KINETICS;
NANOFABRICATION;
SCANNING ELECTRON MICROSCOPY;
SURFACE PROPERTY;
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EID: 72249099870
PISSN: 00027863
EISSN: None
Source Type: Journal
DOI: 10.1021/ja903333s Document Type: Article |
Times cited : (17)
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References (14)
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