Modeling of multi-burst mode pico-second laser ablation for improved material removal rate

Applied Physics A: Materials Science and Processing

Volumn 98, Issue 2, 2010, Pages 407-415

  Hu, Wenqian ^a   Shin, Yung C ^a   King, Galen ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATED MATERIALS; ABLATION DEPTH; ABLATION RATES; BURST MODE; ELECTRON PHONON COUPLINGS; ENERGY TRANSPORT PROCESS; EXPERIMENTAL STUDIES; FLUENCES; MATERIAL REMOVAL RATE; NUMERICAL MODELS; PICOSECOND LASER; PICOSECONDS; PULSE SEPARATIONS; SIMULATION RESULT; SINGLE-PULSE MODE; TEMPERATURE DEPENDENT; TIME EFFECT; TWO-TEMPERATURE MODELS;

LASER ABLATION; LASERS; METAL RECOVERY; PHONONS; PULSED LASER DEPOSITION; SIMULATORS;

PULSED LASER APPLICATIONS;

EID: 72149091980     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-009-5405-x     Document Type: Article

References (24)

1. S. Nolte C. Momma H. Jacobs A. Tünnermann B.N. Chichkov B. Wellegehausen H. Welling 1997 Ablation of metals by ultrashort laser pulses J. Opt. Soc. Am. B 14 2716 10.1364/JOSAB.14.002716 1997OSAJB..14.2716N
2. J. Jandeleit A. Horn E.W. Kreutz R. Poprawe 1997 Micromachining of metals and ceramics by nano- and picosecond laser radiation Proc. SPIE 3223 34 10.1117/12.284498 1997SPIE.3223...34J
3. F. Dausinger H. Hügel V. Konov 2003 Micro-machining with ultrashort laser pulses: From basic understanding to technical applications Proc. SPIE 5147 106 10.1117/12.537496 2003SPIE.5147..106D
4. M. Lapczyna K.P. Chen P.R. Herman H.W. Tan R.S. Marjoribanks 1999 Ultra high repetition rate (133 MHz) laser ablation of aluminum with 1.2-ps pulses Appl. Phys. A 69 S883 10.1007/s003390051552 1999ApPhA..69S.883L
5. R. Le Harzic D. Breitling S. Sommer C. Föhl K. König F. Dausinger E. Audouard 2005 Processing of metals by double pulses with short laser pulses Appl. Phys. A 81 1121 10.1007/s00339-005-3307-0 2005ApPhA..81.1121L (Pubitemid 41241877)
6. A. Semerok C. Dutouquet 2004 Ultrashort double pulse laser ablation of metals Thin Solid Films 453-454 501 10.1016/j.tsf.2003.11.115
7. O. Andrusyak M. Bubelnik J. Mares T. McGovern C.W. Siders 2005 Single-pulse and burst-mode ablation of gold films measured by quartz crystal microbalance Proc. SPIE 5647 61 10.1117/12.585335 2005SPIE.5647...61A
8. A.A. Andreev J. Limpouch A.B. Iskakov H. Nakano 2002 Enhancement of x-ray line emission from plasmas produced by short high-intensity laser double pulses Phys. Rev. E 65 026403 10.1103/PhysRevE.65.026403 2002PhRvE..65b6403A
9. C. Lehane H.S. Kwok 2001 Enhanced drilling using a dual-pulse Nd:YAG laser Appl. Phys. A 73 45 10.1007/s003390100819 2001ApPhA..73...45L
10. A.C. Forsman P.S. Banks M.D. Perry E.M. Campbell A.L. Dodell M.S. Armas 2005 Double-pulse machining as a technique for the enhancement of material removal rates in laser machining of metals J. Appl. Phys. 98 033302 10.1063/1.1996834 2005JAP....98c3302F (Pubitemid 41204743)
11. G.W. Rieger M. Taschuk Y.Y. Tsui R. Fedosejevs 2003 Comparative study of laser-induced plasma emission from microjoule picosecond and nanosecond KrF-laser pulses Spectrochim. Acta, Part B 58 497 10.1016/S0584-8547(03)00014-4 2003AcSpe..58..497R
12. A. Ancona F. Röser K. Rademaker J. Limpert S. Nolte A. Tünnermann 2008 High speed laser drilling of metals using a high repetition rate, high average power ultrafast fiber CPA system Opt. Express 16 8958 10.1364/OE.16.008958 2008OExpr..16.8958A
13. C. Cheng X. Xu 2005 Mechanisms of decomposition of metal during femtosecond laser ablation Phys. Rev. B 72 165415 10.1103/PhysRevB.72.165415 2005PhRvB..72p5415C (Pubitemid 43024141)
14. B. Wu Y.C. Shin 2007 A simple model for high fluence ultra-short pulsed laser metal ablation Appl. Surf. Sci. 247 4079 10.1016/j.apsusc.2006.09.007 2007ApSS..253.4079W (Pubitemid 46177371)
15. B.H. Christensen K. Vestentoft P. Balling 2007 Short-pulse ablation rates and the two-temperature model Appl. Surf. Sci. 253 6347 10.1016/j.apsusc.2007. 01.045 2007ApSS..253.6347C (Pubitemid 46686860)
16. F. Vidal T.W. Johnston S. Laville O. Barthelemy M. Chaker B.L. Drogoff J. Margot M. Sabsabi 2001 Critical-point phase separation in laser ablation of conductors Phys. Rev. Lett. 86 2573 10.1103/PhysRevLett.86.2573 2001PhRvL..86.2573V (Pubitemid 32286706)
17. T.Q. Qiu C.L. Tien 1993 Heat transfer mechanisms during short-pulse laser heating of metals ASME J. Heat Transfer 115 835 10.1115/1.2911377
18. S.I. Anisimov V.V. Zhakhovski N.A. Inogamov K. Nishihara Yu.V. Petrov V.A. Khokhlov 2006 Ablated matter expansion and crater formation under the action of ultrashort laser pulse J. Exp. Theor. Phys. 103 183 10.1134/S1063776106080024 2006JETP..103..183A (Pubitemid 44418703)
19. B. Sallé O. Gobert P. Meynadier M. Perdrix G. Petite A. Semerok 1999 Femtosecond and picosecond laser microablation: ablation efficiency and laser microplasma expansion Appl. Phys. A 69 S381 10.1007/s003390051421 1999ApPhA..69..381S
20. A. Semerok B. Sallé J.F. Wagner G. Petite O. Gobert P. Meynadier M. Perdrix 2001 Microablation of pure metals: laser plasma and crater investigations Proc. SPIE 4423 153 10.1117/12.431217 2001SPIE.4423..153S
21. S.S. Wellershoff J. Hohlfeld J. Güdde E. Matthias 1999 The role of electron-phonon coupling in femtosecond laser damage of metals Appl. Phys. A 69 S99 1999ApPhA..69S..99W
22. J.K. Chen W.P. Latham J.E. Beraun 2005 The role of electron-phonon coupling in ultrafast laser heating J. Laser Appl. 17 63 10.2351/1.1848522 (Pubitemid 43033004)
23. N.N. Nedialkov S.E. Imamova P.A. Atanasov 2004 Ablation of metals by ultrashort laser pulses J. Phys. D: Appl. Phys. 37 638 10.1088/0022-3727/37/4/ 016 2004JPhD...37..638N
24. K. Furusawa K. Takahashi H. Kumagai K. Midorikawa M. Obara 1999 Ablation characteristics of Au, Ag, and Cu metals using a femtosecond Ti:sapphire laser Appl. Phys. A 69 S359 10.1007/s003390051417 1999ApPhA..69S.359F