Template-assisted three-dimensional nanolithography via geometrically irreversible processing

Nano Letters

Volumn 9, Issue 12, 2009, Pages 4424-4427

  Yu, Xindi ^a   Zhang, Huigang ^a   Oliverio, John K ^a   Braun, Paul V ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D TEMPLATES; COLLOIDAL CRYSTALS; CONFORMAL GROWTH; CONVENTIONAL METHODS; METAL ELEMENTS; METALLO-DIELECTRIC PHOTONIC CRYSTALS; NANOFABRICATION TECHNIQUES; NEAR-IR; SURFACE CURVATURES; THREE-DIMENSIONAL (3D);

PHOTONIC CRYSTALS; THREE DIMENSIONAL;

NANOLITHOGRAPHY;

METAL; NANOMATERIAL;

ARTICLE; CHEMISTRY; CONFORMATION; CRYSTALLIZATION; MACROMOLECULE; MATERIALS TESTING; METHODOLOGY; NANOTECHNOLOGY; PARTICLE SIZE; PHOTOGRAPHY; SURFACE PROPERTY; ULTRASTRUCTURE;

CRYSTALLIZATION; MACROMOLECULAR SUBSTANCES; MATERIALS TESTING; METALS; MOLECULAR CONFORMATION; NANOSTRUCTURES; NANOTECHNOLOGY; PARTICLE SIZE; PHOTOGRAPHY; SURFACE PROPERTIES;

EID: 71949106464     PISSN: 15306984     EISSN: None     Source Type: Journal    
DOI: 10.1021/nl9027236     Document Type: Article

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