Effect of hydrogen on the physical and mechanical properties of silicon carbide-derived carbon films

Surface and Coatings Technology

Volumn 204, Issue 6-7, 2009, Pages 1018-1021

  Choi, Hyun Ju ^a   Bae, Heung Taek ^a   McNallan, Michael J ^b   Sohn, Yong Ho ^c   Lim, Dae Soon ^a  

^a Korea University   (South Korea)

^b University of Illinois at Chicago   (United States)

^c University of Central Florida   (United States)

Author keywords

Chlorination; Graphitization; Nanoindentation; Plasticity; Silicon carbide

Indexed keywords

C-H BOND; DERIVED CARBONS; EFFECT OF HYDROGEN; HARDNESS AND ELASTIC MODULUS; HYDROGEN CONCENTRATION; NANO-SIZE; PHYSICAL AND MECHANICAL PROPERTIES; RAMAN INTENSITIES; SELECTIVE ETCHING; XRD ANALYSIS;

CARBON CLUSTERS; CHLORINATION; GAS MIXTURES; GRAPHITE; GRAPHITIZATION; HYDROGEN; MECHANICAL PROPERTIES; NANOINDENTATION; PLASTICITY; SILICON CARBIDE;

CARBON FILMS;

EID: 71849102931     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.05.023     Document Type: Article

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