MIS field effect transistor with barium titanate thin film as a gate insulator

Materials Science and Engineering: B

Volumn 165, Issue 1-2, 2009, Pages 126-128

  Firek, P ^a   Werbowy, A ^a   Szmidt, J ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Barium titanate; I V characteristics; MISFET structures; Radio frequency plasma sputtering

Indexed keywords

LANTHANUM OXIDES; METAL INSULATOR BOUNDARIES; MICROELECTRONICS; MIS DEVICES; RADIO WAVES; THIN FILMS; THRESHOLD VOLTAGE; TRANSISTORS;

BARIUM TITANATE THIN FILMS; FIELD EFFECT TRANSISTOR STRUCTURES; FIELD-EFFECT TRANSISTOR; GATE INSULATOR; I-V CHARACTERISTIC; METAL INSULATOR SEMICONDUCTOR FIELD EFFECT TRANSISTOR STRUCTURE; METAL-INSULATOR-SEMICONDUCTOR FIELD-EFFECT TRANSISTORS; PLASMA SPUTTERING; RADIO FREQUENCY PLASMA; RADIO FREQUENCY PLASMA SPUTTERING;

BARIUM TITANATE;

EID: 71749117755     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2009.02.018     Document Type: Article

References (13)

1. Scott J.F. Japan Journal of Applied Physics 38 (1999) 2272-2274
2. Ramesh R., Aggarwal S., and Auciello O. Material Science and Engineering 32 (2001) 191-236
3. Kuroiwa T., Tsunemine Y., Horikawa T., Makita T., Tanimura J., Mikami N., et al. Japan Journal of Applied Physics 33 (1994) 5187-5191
4. Zhen J., Yue Z., Yousong G., Sen W., Lingfeng L., Zhigang X., and Yanbin W. Ceramics International 32 (2006) 447-450
5. A. Rae, M. Chu, V. Ganine, Barium titanate-past, present and future, in: Ceramic Transactions, vol. 100, Dielectric Ceramic Materials '98, 1999, pp. 1-12.
6. Sun D.-G., Liu Z., Huang Y., Ho S.-T., Towner D.J., and Wessels B.W. Optics Communications 255 (2005) 319-330
7. Tang P., Towner D.J., Hamano T., Meier A.L., and Wessels B.W. Optics Express 12 24 (2004) 5962-5967
8. Polla D.L., and Francis L.F. MRS Bulletin 21 (1996) 59-65
9. Fuenzalida V.M., Pilleux M.E., and Eisele I. Vacuum 55 (1999) 81-83
10. Kumar M., Rani S., Bhatnagar M.C., and Roy S.C. Materials Chemistry and Physics 107 (2008) 399-403
11. Affleck L., and Leach C. Journal of the European Ceramic Society 25 (2005) 3017-3020
12. Thomas R., Dube D.C., Kamalasanan M.N., and Deepak Kumar N. Journal of Sol-Gel Science and Technology 16 (1999) 101-107
13. Werbowy A., Firek P., Chojnowski J., Olszyna A., Szmidt J., and Kwietniewski N. Physica Status Solidi (c) 4 4 (2007) 1578-1580