2D scanning MEMS stage integrated with microlens arrays for high-resolution beam steering

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Volumn , Issue , 2009, Pages 43-44

  Gokce, Sertan Kutal ^a   Holmstrom, Sven ^a   Hibert, Cyrille ^a,b   Ataman, Caglar ^a,b   Arslan, Aslihan ^a   Seren, Huseyin R ^a   Urey, Hakan ^a  

^a KOÇ UNIVERSITY   (Turkey)

^b EPFL   (Switzerland)

Author keywords

Beam steering; Comb drive; Hybrid integration

Indexed keywords

2D SCANNING; BEAM-STEERING; COMB DRIVE; COMB FINGERS; HIGH RESOLUTION; HYBRID INTEGRATION; IN-PLANE; MEMS STAGE; MICRO-LENS; MICRO-LENS ARRAYS; OUT-OF-PLANE;

MEMS; MICROELECTROMECHANICAL DEVICES; MICROLENSES; MICROOPTICS; NANOPHOTONICS;

PHOTONICS;

EID: 71749104555     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2009.5338606     Document Type: Conference Paper

References (3)

1. A. Akatay and H. Urey, Design and optimization of microlens array based high resolution beam steering system, Optics Express, Vol. 15, No. 8, p. 4523-4529, 2007.
2. A. Arslan, C. Ataman, S. Holmstrom, K. Hedsten, P. Enoksson, H. R. Seren, H. Urey, "Mechanically coupled comb drive MEMS stages" IEEE Optical MEMS and Nanophotonics, Freiburg, Germany, p. 140-141, 2008.
3. A. D. Yalçinkaya, H. Urey, D. Brown, T. Montague, R. Sprague, "Two-Axis Electromagnetic microscanner for high resolution displays", IEEE J. Microelectromechanical Systems, Vol. 15 (4), p. 786-794, Aug 2006.