Electrically separated two-axis MEMS mirror array module for wavelength selective switches

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Volumn , Issue , 2009, Pages 158-159

  Usui, Mitsuo ^a   Uchiyama, Shingo ^a   Hashimoto, Etsu ^a   Hadama, Koichi ^a   Ishii, Yuzo ^a   Matsuura, Nobuaki ^a   Sakata, Tomomi ^a   Shimoyama, Nobuhiro ^a   Sato, Yasuhiro ^a   Ishii, Hiromu ^a   Matsuura, Tohru ^a   Shimokawa, Fusao ^a   Uenishi, Yuji ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Electrical interference; MEMS; Mirror array; Packaging technology; Wavelength selective switches (WSSs)

Indexed keywords

ADJACENT CHANNELS; ELECTRICAL INTERFERENCE; ELECTRODE STRUCTURE; MEMS MIRRORS; PACKAGING TECHNOLOGIES; SYSTEM REQUIREMENTS; TWO-AXIS; WAVELENGTH-SELECTIVE SWITCHES;

MICROELECTROMECHANICAL DEVICES; MIRRORS; NANOPHOTONICS; PHOTONICS;

MEMS;

EID: 71749100486     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2009.5338611     Document Type: Conference Paper

References (3)

1. Pierre Wall, et al., "WSS Switching Engine Technologies," Proc. OFC/NFOEC 2008, OWC1, Feb. 2008.
2. Chao-Hsi Chi, et al., "Integrated 1x4 Wavelenght-Selective Switch with On-Chip MEMS Micromirrors," Proc. QELS '05 vol.3, JThE58, pp.1732-1734, May 2005.
3. Sophia Huang, et al., "Open-Loop Operation of MEMS WDM Routers with Analog Micromirror Array," Proc. Optical MEMS 2002, ThD2, pp.179-180, Aug. 2002.