Superparamagnetic photosensitive polymer nanocomposite for microactuators

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 869-872

  Suter, M ^a   Graf, S ^a   Ergeneman, O ^a   Schmid, S ^a   Camenzind, A ^a   Nelson, B J ^a   Hierold, C ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Magnetic cantilever; Magnetic microactuator; Magnetic polymer; Magnetic resonant structure; Magnetic SU 8; Photosensitive composite; Superparamagnetic composite

Indexed keywords

EXTERNAL COILS; MAGNETIC MICRO ACTUATORS; MAGNETIC POLYMERS; MATRIX; MICRO-CANTILEVERS; PHOTOSENSITIVE POLYMERS; RESONANT STRUCTURES; SUPERPARAMAGNETIC NANOPARTICLES; SUPERPARAMAGNETICS; UNIFORM DISTRIBUTION;

ATOMIC FORCE MICROSCOPY; LIGHT SENSITIVE MATERIALS; MAGNETIC FIELDS; MICROACTUATORS; MICROSYSTEMS; NANOCANTILEVERS; NANOCOMPOSITES; NANOPARTICLES; PHOTORESISTS; PHOTOSENSITIVITY; PIEZOELECTRIC TRANSDUCERS; POLYMERS; SOLID-STATE SENSORS; SUPERPARAMAGNETISM; SURFACE ACTIVE AGENTS;

MAGNETIC MATERIALS;

EID: 71549138690     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285841     Document Type: Conference Paper

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