Low-cost LTCC-based sensors for low force ranges

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 899-902

  Craquelin, N ^a   Maeder, T ^a   Fournier, Y ^a   Ryser, P ^a  

^a EPFL   (Switzerland)

Author keywords

3D structured beam; low force sensor; LTCC; piezoresistive bridge

Indexed keywords

FORCE SENSOR; LOW FORCE SENSOR; LTCC (LOW TEMPERATURE CO-FIRED CERAMIC); PIEZO-RESISTIVE; PIEZORESISTIVE FORCE SENSORS; SIGNAL CONDITIONING; SMALL LOAD; YOUNG'S MODULUS;

COBALT; THREE DIMENSIONAL;

SENSORS;

EID: 71549128032     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.224     Document Type: Conference Paper

References (3)

1. Maeder-T Fahrny-V Stauss-S Corradini-G Ryser-P, "Design and characterisation of low-cost thick-film piezoresistive force sensors for the 100 mN to 100 N range", Proceedings, XXIX International Conference of IMAPS Poland, Koszalin (2005), 429-434.
2. Birol-H Maeder-T Nadzeyka-I Boers-M Ryser-P, "Fabrication of a millinewton force sensor using low temperature co-fired ceramic (LTCC) technology", Sensors and Actuators A Vol. 134 (2007), 334-338.
3. Seigneur-F Fournier-Y Maeder-T Ryser-P Jacot-J, "Hermetic package for optical MEMS", Proceedings, International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), Munich (DE), 627-633 (THA24), 2008.