A digital accelerometer using a microscale liquid-metal droplet in photosensitive glass channel

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 676-679

  Yoo, Kwanghyun ^a   Lee, Chan ^a   Kim, Joonwon ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Accelerometer; Contact angle hysteresis; Liquid metal droplet; Non wetting; Photosensitive glass

Indexed keywords

CHANNEL SURFACE; CONTACT ANGLE HYSTERESIS; EFFECTIVE MECHANISMS; ELECTRICAL CONDUCTION; ETCHING PROCESS; GLASS CHANNELS; HIGH DENSITY; LIQUID METAL DROPLETS; MICROSCALE LIQUID; NON-WETTING; PHOTO-DEFINABLE;

ACCELEROMETERS; ACTUATORS; CONTACT ANGLE; DROP FORMATION; ELECTRIC PROPERTIES; ETCHING; HYSTERESIS; LAGRANGE MULTIPLIERS; LIGHT SENSITIVE MATERIALS; LIQUIDS; MECHANICAL PROPERTIES; MECHANICAL STABILITY; METALS; MICROSYSTEMS; PHOTOSENSITIVITY; PIEZOELECTRIC TRANSDUCERS; SOLID-STATE SENSORS; SURFACE TENSION; WETTING;

PHOTOSENSITIVE GLASS;

EID: 71449125019     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285415     Document Type: Conference Paper

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