|
|
Volumn , Issue , 2009, Pages 1730-1733
|
|
Implementation of a monolithic TPMS using CMOS-MEMS technique
|
|
Author keywords
Accelerometer; CMOS MEMS; Pressure sensor; Temperature sensor; TPMS
|
|
Indexed keywords
CAPACITIVE ACCELEROMETERS;
CAPACITIVE PRESSURE SENSORS;
CMOS-MEMS;
MEASUREMENT RESULTS;
POST PROCESS;
PRESSURE AND TEMPERATURE SENSORS;
SENSING CIRCUITS;
SINGLE CHIPS;
TIRE-PRESSURE MONITORING SYSTEMS;
ACCELEROMETERS;
ACTUATORS;
MEMS;
MICROELECTROMECHANICAL DEVICES;
MICROSYSTEMS;
PIEZOELECTRIC TRANSDUCERS;
PLATINUM;
PRESSURE SENSORS;
PRESSURE TRANSDUCERS;
TEMPERATURE SENSORS;
SOLID-STATE SENSORS;
|
|
EID: 71449104245
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2009.5285736 Document Type: Conference Paper |
|
Times cited : (5)
|
|
References (10)
|
