MEMS on robot applications

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 2176-2181

  Noda, K ^a   Hashimoto, Y ^a   Tanaka, Y ^a   Shimoyama, I ^a,b  

^a UNIVERSITY OF TOKYO   (Japan)

^b Information and Robot Technology (IRT) Research Initiative   (Japan)

Author keywords

MEMS; Proximity sensor; Robotics; Tactile sensor

Indexed keywords

APPROACHING MOTION; CONTACT FORCES; DAILY LIVES; DEXTEROUS MANIPULATION; MEMS SENSORS; PIEZO-RESISTIVE CANTILEVERS; RESISTANCE CHANGE; TACTILE SENSOR; TACTILE SENSORS; TARGET OBJECT; TIME VARIATIONS; VISCOUS LIQUIDS;

ACTUATORS; HIGH PASS FILTERS; LIQUIDS; MEMS; MICROCHANNELS; MICROSENSORS; MICROSYSTEMS; NANOCANTILEVERS; PIEZOELECTRIC TRANSDUCERS; PROXIMITY SENSORS; RAILROAD ROLLING STOCK; ROBOT APPLICATIONS; ROBOTICS; ROBOTS; SILICONES; SOLID-STATE SENSORS; ULTRASONIC APPLICATIONS;

ROBOT PROGRAMMING;

EID: 71449093974     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285608     Document Type: Conference Paper

References (4)

1. Y. Hashimoto, A. Nakai, H. Kawano, K. Matsumoto, and I. Shimoyama, "Thin and Small Ultrasonic Distance Sensor with Thermoacoustic Transmitter and Piezoresistive Cantilever Receiver," 4th APCOT Conference, 2008.
2. K. Noda, K. Hoshino, K. Matsumoto, and I. Shimoyama," Ashear stress sensor for tactile sensing with the piezoresistive cantilever standing in elastic material," Sensors and Actuators A, Vol. 127, pp. 295-301, 2006.
3. Y. Tanaka, A. Nakai, E. Iwase, T. Goto, K. Matsumoto, I. Shimoyama, "Triaxial Tactile Sensor Chips with Piezoresistive Cantilevers Mountable on Curved Surface," 4th APCOT Conference, 2008.
4. K. Noda, K. Matsumoto, I. Shimoyama, "Flexible tactile sensor with liquid filter for shear force detection," 22th IEEE International Conference of Micro Electro Mechanical Systems, 2009.