Thin film diffusion barrier formation in PDMS microcavities

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1051-1054

  Riaz, Asif ^a,b   Gandhiraman, Ram P ^a   Dimov, Ivan K ^a   Basabe Desmonts, Lourdes ^a   Ricco, Antonio J ^a   Ducrée, Jens ^a   Daniels, Stephen ^a   Lee, Luke P ^a,b  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b University of California   (United States)

Author keywords

Diffusion barrier; Hexamethyldisiloxane; Microfluidics; Plasma enhanced vapor deposition; Polydimethylsiloxane

Indexed keywords

BARRIER FORMATION; FLUORESCENT DYES; HEXAMETHYL DISILOXANE; MEDICAL DEVICES; MICROFLUIDIC CHANNEL; POLYDIMETHYLSILOXANE PDMS; REACTION CHAMBERS; RF PLASMA; RHODAMINE B; THIN FILM BARRIERS; THIN-FILM DIFFUSION;

ACTUATORS; CAPILLARY ELECTROPHORESIS; DIFFUSION BARRIERS; GLASS; MICROCAVITIES; MICROCHANNELS; MICROFLUIDICS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; PLASMA DEPOSITION; SILICONES; SURFACE REACTIONS; THIN FILM DEVICES; THIN FILMS;

SOLID-STATE SENSORS;

EID: 71449091914     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285939     Document Type: Conference Paper

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