Tactile array sensor with inclined chromium/silicon piezoresistive cantilevers embedded in elastomer

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 284-287

  Sohgawa, M ^a   Mima, T ^a   Onishi, H ^a   Kanashima, T ^a   Okuyama, M ^a   Yamashita, K ^a,b   Noda, M ^a,b   Higuchi, M ^c   Noma, H ^d  

^a OSAKA UNIVERSITY   (Japan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

^c OMRON CORPORATION   (Japan)

^d ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL   (Japan)

Author keywords

Micro cantilever; Polydimethylsiloxane; Shear force detection; Surface micromachining; Tactile sensor

Indexed keywords

ARRAY SENSORS; DIRECTIONAL CHARACTERISTIC; MICRO CANTILEVER; MICRO-CANTILEVERS; MULTIPLE MEASUREMENTS; OUTPUT VOLTAGES; PIEZO-RESISTIVE CANTILEVERS; REPRODUCIBILITIES; SENSOR ELEMENTS; SENSOR OUTPUT; SENSOR SURFACES; SHEAR FORCE DETECTION; TACTILE SENSORS;

ACTUATORS; ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; MICROSYSTEMS; NANOCANTILEVERS; PIEZOELECTRIC TRANSDUCERS; RUBBER; SHEAR STRESS; SILICONES; STRENGTH OF MATERIALS; SURFACE MICROMACHINING;

SOLID-STATE SENSORS;

EID: 71449091405     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285509     Document Type: Conference Paper

References (5)

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2. S. Yoshida, T. Miyazawa, T. Mizota, K. Higuchi, T.Kanashima, H. Noma, "Development of a Microscopic Three-axis Tactile Sensor: A Study of Sensing and Computing Method by Using a Simulated Mockup," 16th IEEE Symp. on Haptic Interfaces for Virtual Environment and Teleoperator Systems, Reno, NV, USA, 2008.
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4. M. Sohgawa, H. Onishi, T. Mima, Y. -M. Huang, T. Kanashima, K. Yamashita, M. Noda, M Okuyama, M. Ikeda, H. Noma, "Detection of Normal and Shear Stresses by Tactile Sensors with Piezoresistive Microcantilever and Elastomer", in 4th Asia Pacific Conference on Transducers and Micro/nano Technologies, Tainan, Taiwan, June 22-25, 2008, pp. 31.
5. H. Onishi, M. Sohgawa, H. Tachibana, Y. M. Huang, T. Kanashima, M. Okuyama, K. Yamashita, M. Noda, H. Noma, "Stability Improvement of Tactile Sensor of Normal and Shear Stresses Using NiCr Thin Film Gauge", IEEJ Trans. Sens. Micromachines, vol. 129, 2009 (to be published).