MEMS-based mechanically tunable flexible photonic crystal

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 509-512

  Cui, Y H ^a   Wu, Q ^b   Park, W ^b   Jeon, J ^a   Kim, M J ^a   Lee, J B ^a  

^a The University of Texas at Dallas   (United States)

^b UCB 450   (United States)

Author keywords

Flexible; MEMS; Photonic crystal; SU 8; Tunable

Indexed keywords

ELECTRO-THERMAL ACTUATORS; FLEXIBLE; HIGH-INDEX; MECHANICAL FORCE; MECHANICAL STRESS; PERIODIC ARRAYS; PHOTONIC BAND STRUCTURES; TUNABILITIES; TUNABLE PHOTONIC CRYSTAL;

ACTUATORS; CRYSTAL STRUCTURE; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PHOTONIC CRYSTALS; PIEZOELECTRIC TRANSDUCERS; STRESSES; SURFACE MICROMACHINING;

SOLID-STATE SENSORS;

EID: 71449089433     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285373     Document Type: Conference Paper

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