High-performance humidity sensor with polyimide nano-grass

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1011-1014

  Lee, Hyemin ^a   Jung, Seungwon ^a   Kim, Hyungchul ^a   Lee, Junghoon ^a  

^a Seoul National University   (South Korea)

Author keywords

Humidity sensor; Nano gras; Plasma etch; Polyimide

Indexed keywords

AFM; CAPACITIVE HUMIDITY SENSORS; CARBONYL GROUPS; DIELECTRIC CONSTANTS; HIGH SENSITIVITY; NANO-GRAS; PLASMA ETCH; PLASMA TREATMENT; POLYIMIDE LAYERS; QUICK RESPONSE; SENSOR PERFORMANCE; SURFACE-TO-VOLUME RATIO; WATER ADSORPTION; WATER MOLECULE; XPS;

ACTUATORS; ADSORPTION; FLUORINE CONTAINING POLYMERS; HUMIDITY SENSORS; MICROSYSTEMS; MOISTURE; PIEZOELECTRIC TRANSDUCERS; PLASMA APPLICATIONS; PLASMAS; POLYIMIDES; SOLID-STATE SENSORS; SURFACE CHEMISTRY; SURFACE MORPHOLOGY; WATER TREATMENT;

NANOSENSORS;

EID: 71449086600     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285959     Document Type: Conference Paper

References (7)

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