Silver nanoparticle structures realized by digital surface micromachining

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1698-1701

  Lam, E W ^a   Li, H ^a   Schmidt, M A ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Inkjet; MEMS; Nanoparticles; Printing

Indexed keywords

DIGITAL FABRICATION; DIGITAL SURFACES; FEATURE SIZES; INKJET; MAXIMUM TEMPERATURE; SILVER FILM; SILVER NANOPARTICLES; SURFACE MICROMACHINING PROCESS;

ACTUATORS; COMPOSITE MICROMECHANICS; DIGITAL DEVICES; MATERIALS PROPERTIES; MECHANICAL PROPERTIES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; NANOPARTICLES; PIEZOELECTRIC TRANSDUCERS; PRINTING; SOLID-STATE SENSORS; SURFACE MICROMACHINING;

SILVER;

EID: 71449085977     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285759     Document Type: Conference Paper

References (4)

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