Symmetric silicon micro fuel cell with porous electrodes

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1401-1404

  Scotti, Gianmario ^a   Kanninen, Petri ^a   Kallio, Tanja ^a   Franssila, Sami ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

PEFC; Black silicon; MEMS; Micro fuel cell

Indexed keywords

ANISOTROPIC PLASMA ETCHING; BLACK SILICON; FLOW CHANNELS; HIGH CONCENTRATION; HIGH POWER DENSITY; INTEGRABILITY; ISOTROPIC PLASMA; MICROFUEL CELL; PEM FUEL CELL; POROUS ELECTRODES; SILICON NANOGRASS; SURFACE AREA; TRIPLE JUNCTION;

ACTUATORS; ELECTRODES; FUEL CELLS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; OXYGEN; PIEZOELECTRIC TRANSDUCERS; PLASMA ETCHING; POROUS SILICON;

SOLID-STATE SENSORS;

EID: 71449084305     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285834     Document Type: Conference Paper

References (6)

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