Applying the calibration comparison technique for verification of transmission line standards on silicon up to 110 GHz

73rd ARFTG Microwave Measurement Conference Spring 2009 - Practical Applications of Nonlinear Measurements

Volumn , Issue , 2009, Pages

  Rumiantsev, Andrej ^a   Corson, Phillip L ^b   Sweeney, Susan L ^b   Arz, Uwe ^c  

^a SUSS MicroTec Lithography GmbH   (United States)

^b IBM MICROELECTRONICS   (United States)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION STANDARD; CMOS PROCESSS; COMPARISON METHODS; COMPARISON TECHNIQUES; ELECTRICAL CHARACTERISTIC; GAAS; MM-WAVE FREQUENCIES; PLANAR LINES; REFERENCE BENCHMARKS; REFERENCE MATERIAL; TRANSMISSION LINE;

BANDPASS FILTERS; CALIBRATION; MICROWAVE MEASUREMENT; MICROWAVES; MILLIMETER WAVES; SILICON WAFERS; STANDARDS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 71249112255     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ARFTG.2009.5278064     Document Type: Conference Paper

References (11)

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