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Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 6, Issue 10, 2009, Pages 2179-2183

The stress and microstructure of a-C multilayers deposited using a filtered cathodic vacuum arc and periodic substrate bias

(4) Xiao, Xiaoling a Partridge, Jim a Taylor, Matthew a McCulloch, Dougal a

a RMIT UNIVERSITY (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

A-C FILM; AMORPHOUS CARBON (A-C); BIAXIAL STRESS; CARBON IONS; DEPOSITION PROCESS; FILTERED CATHODIC VACUUM ARC; GRAPHITIC PLANES; INCIDENT ENERGY; ION ENERGIES; LOW DENSITY; PREFERRED ORIENTATIONS; ROOM TEMPERATURE; SUBSTRATE BIAS; SUBSTRATE BIAS VOLTAGES; TIME DEPENDENT; VACUUM ARC DEPOSITION SYSTEM;

AMORPHOUS CARBON; CAVITY RESONATORS; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; MICROSTRUCTURE; MULTILAYER FILMS; MULTILAYERS; NANOTECHNOLOGY; SURFACE RELAXATION; TRANSMISSION ELECTRON MICROSCOPY; VACUUM; VACUUM DEPOSITION;

SUBSTRATES;

EID: 70949091613 PISSN: 18626351 EISSN: None Source Type: Journal
DOI: 10.1002/pssc.200881704 Document Type: Conference Paper

Times cited : (3)

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