Deposition of Ti/C nano-composite DLC films by magnetron DC sputtering with dual targets

Vacuum

Volumn 84, Issue 5, 2009, Pages 666-668

  Sonoda, T ^a   Nakao, S ^a   Ikeyama, M ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Co sputtering; Diamond like carbon; DLC film; Electrical resistivity; Hardness; Nano composite; Raman spectroscopy; Titanium

Indexed keywords

CARBON TARGETS; COSPUTTERING; DC SPUTTERING; DIAMOND-LIKE CARBON; DLC FILM; ELECTRICAL RESISTIVITY; INDENTATION HARDNESS; NANO-COMPOSITE STRUCTURE; TITANIUM CONTAINING; WAVE NUMBERS;

ARGON; CARBON FILMS; COBALT; DIAMOND FILMS; ELECTRIC CONDUCTIVITY; HARDNESS; MAGNETRONS; MECHANICAL PROPERTIES; NANOCOMPOSITES; RAMAN SCATTERING; RAMAN SPECTROSCOPY; STRUCTURE (COMPOSITION); TARGETS; TITANIUM;

COMPOSITE FILMS;

EID: 70649088956     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.06.013     Document Type: Article

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