Fabrication of carbon nanotube via interconnects at low temperature and their robustness over a high-density current

Sensors and Materials

Volumn 21, Issue 7, 2009, Pages 373-383

  Sato, Shintaro ^a,b   Kawabata, Akio ^a,b   Nozue, Tatsuhiro ^a   Hondo, Daiyu ^a,b   Murakami, Tomo ^a   Hyakushima, Takashi ^a   Nihei, Mizuhisa ^a,b   Awano, Yuji ^a,b  

^a SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC   (Japan)

^b FUJITSU LABORATORIES LTD   (Japan)

Author keywords

Carbon nanotube; Catalyst; Growth; Impactor; Interconnect; Low temperature; LSI; Nanoparticle; Particle; Via

Indexed keywords

EID: 70450199403     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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