Numerical simulations on capture area of gas molecules for high brightness gas field ion source

Technical Digest - 2009 22nd International Vacuum Nanoelectronics Conference, IVNC 2009

Volumn , Issue , 2009, Pages 213-214

  Sugiyama, Yasuhiko ^a,b   Kobayashi, Yusuke ^a   Morikawa, Yuuki ^a   Kajiwara, Kazuo ^a   Hata, Koichi ^a  

^a MIE UNIVERSITY   (Japan)

^b SII NANOTECHNOLOGY INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 70449816047     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IVNC.2009.5271582     Document Type: Conference Paper

References (2)

1. B.W.Ward, John A. Notte and N.P.Economou, J.Vac.Sci.Technol. B24, 1287 (2006)
2. nd ed. (2009) CRC Press (New York).