SMD pressure and flow sensors for industrial compressed air in LTCC technology

2009 European Microelectronics and Packaging Conference, EMPC 2009

Volumn , Issue , 2009, Pages

  Fournier, Y ^a   Barras, A ^a   Boutinard Rouelle, G ^a   Maeder, T ^a   Ryser, P ^a  

^a EPFL   (Switzerland)

Author keywords

Flow; LTCC; Pressure; Sensor; SMD

Indexed keywords

FLOW; FLOW-SENSORS; FLUIDIC CHANNELS; LTCC TECHNOLOGY; PRESSURE AND TEMPERATURE; SENSING ELEMENTS; SIGNAL CONDITIONING; STANDARD COMPONENTS; SURFACE MOUNT DEVICE; TEMPERATURE COMPENSATION;

COLD STORAGE; COMPRESSED AIR; MICROELECTRONICS; PLATINUM COMPOUNDS; PNEUMATICS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; PRESSURE VESSELS; SURFACE MOUNT TECHNOLOGY;

CAISSONS;

EID: 70449806059     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. J. Kita, F. Rettig, R. Moos, K. Drue, H. Thust, "Hot-Plate Gas Sensors - are Ceramics Better?", Proceedings of CICMT 2005.
2. Y. Fournier, R. Willigens, T. Maeder, P. Ryser, "Integrated LTCC micro-fluidic modules - an SMT flow sensor", 15th European Microelectronics and Packaging Conference - IMAPS, pages P2.06, 577-581, 2005.
3. Y. Fournier, O. Triverio, T. Maeder, P. Ryser, "LTCC free-standing structures with mineral sacrificial paste", Proceedings of Ceramic Interconnect and Ceramic Microsystems Technologies, Munich (DE), pages 11-18 (TA12), 2008.
4. H. Birol, T. Maeder, P. Ryser, "Application of graphite-based sacrificial layers for fabrication of LTCC (low temperature co-fired ceramic) membranes and micro-channels", Journal of Micromechanics and Microengineering 17, 50-60, 2007.
5. ZMD31010-RBic-Lite-DataSheet-1.97-24-Sep-08.pdf, from www.zmd.biz