Fabrication of optical waveguide devices using electromagnetic assisted nanoimprinting

2009 International Conference on Signal Processing Systems, ICSPS 2009

Volumn , Issue , 2009, Pages 910-912

  Weng, Yung Jin ^a   Weng, Yung Chun ^b   Wong, Yong Cheng ^c   Yang, Sen Yeu ^b   Liu, Hsu Kang ^d  

^a KAINAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^d NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Electromagnetic control technology; Magnetic powder; Magnetic flexible mold; Nanoimprinting technology; Optical waveguide

Indexed keywords

CREATIVE TECHNOLOGY; ELECTROMAGNETIC CONTROL; MAGNETIC POWDER; MAGNETIC POWDERS; MICRO HOT EMBOSSING; NANO-IMPRINTING; NANOIMPRINTING TECHNOLOGY; OPTICAL WAVEGUIDE DEVICE; PRESSING TECHNOLOGY; SOFT LITHOGRAPHY;

ELECTROMAGNETISM; HOT PRESSING; INTEGRATED OPTOELECTRONICS; MOLDS; OPTICAL WAVEGUIDES; SIGNAL PROCESSING; SILICONES; TECHNOLOGY; WAVEGUIDE COMPONENTS;

MAGNETIC MATERIALS;

EID: 70449650461     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSPS.2009.179     Document Type: Conference Paper

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