Restoration of scanning probe microscope images

Proceedings of IEEE Workshop on Applications of Computer Vision

Volumn 1992-November, Issue , 1992, Pages 282-289

  Pingali, Gopal Sarma ^a   Jain, Ramesh ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER VISION; RESTORATION; SCANNING PROBE MICROSCOPY; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE;

3-D METROLOGIES; HIGH RESOLUTION; MORPHOLOGICAL OPERATOR; PROBE GEOMETRY; SCANNING PROBES; SEMICONDUCTOR INDUSTRY; SYNTHETIC AND REAL DATA; TOPOGRAPHIC IMAGES;

IMAGE RECONSTRUCTION;

EID: 70449645727     PISSN: 21583978     EISSN: 21583986     Source Type: Conference Proceeding    
DOI: 10.1109/ACV.1992.240301     Document Type: Conference Paper

References (9)

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6. Pingali, G.S. and Jain, R., "Imaging Models and Surface Recovery Methods for Scanning Probe Microscopy." Computer Science and Engineering Technical Report CSE-TR-137-92, Department of Electrical Engineering and Computer Science, The University of Michigan, Ann Arbor, 1992.
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