Microfabrication of Si/SiO2-spherical shells as a path to sub-mm3 autonomous robotic systems

Materials Research Society Symposium Proceedings

Volumn 1139, Issue , 2009, Pages 153-158

  Vasilyev, Vladimir S ^a   Reid, J Robert ^b   Webster, Richard T ^b  

^a S4 Inc   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTONOMOUS ROBOTIC SYSTEMS; FABRICATION PROCESS; MECHANICAL MODEL; MICROROBOTS; MULTILAYER STACKS; POWER SOURCES; RADIUS OF CURVATURE; SELF-ASSEMBLING; SPHERICAL SHELL; WET AND DRY;

COMPOSITE MICROMECHANICS; EPITAXIAL GROWTH; FABRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHOTOVOLTAIC CELLS; PLASMA ETCHING; ROBOTS; SHELLS (STRUCTURES); SOLAR ENERGY;

SPHERES;

EID: 70449602764     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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2. J.R. Reid, V. Vasilyev, R.T. Webster, Proc. of Nanotech 2008, Boston, MA, June 2008.
3. O. Tabata, R. Asahi, H. Funabashi, K. Shimaoka, and S. Sugiyama, Sensors and Actuators. 34, 51 (1992).
4. B. Schwartz and H. Robbins, J. Electrochem. Soc. 123, 1903 (1976).
5. P. B. Chu, J. T. Chen, R. Yeh, G. Lin, J. C. P. Huang, B. A. Warneke, and K. S. J. Pister, Digest of the International Conference on Solid-State Sensors and Actuators. 1, 665 (1997).